Nanofabrication Facility
LITHOGRAPHY
- Quintel NXQ 4000 Mask Aligner
- OAI Model 30 Collimated UV Exposure System
- Laurell WS-650S-23TFM-LITE Spin Coater
- EZ4 Spin Coater
- Fisher Scientific Isotemp Hot Plate Stirrer
DEPOSITION
- Kurt J. Lesker PVD 75 Sputtering and Thermal Evaporation System
- Denton Vacuum DV-502B Thermal Evaporator
- Nanocluster Deposition System
ETCHING
- PIE Scientific Tergo Plasma Cleaner
METROLOGY
- FEI/Thermo Scios Dual-Beam FIB/SEM
- Carl Zeiss Supra 35VA SEM
- Thermo Scientific Noran System 7 X-ray Microanalysis System
- Atomic Force Microscope (AFM)
PACKAGING
- Disco DAD 320 Dicing Saw
- K&S 4524AD Ball Wire Bonder
- K&S 4523 Wedge Wire Bonder
- Orthodyne Model 20 Large Wire Bonder
- XYZTEC Condor 70 Wire Pull and Die Shear Bonding Tester
- AMI Presco MSP-485 Semi-Automatic Thick Film Stencil Screen Printer
- Palomar SST 3130 Vacuum Pressure Furnace
- Kepro BTL121 PCB Photolighography Dry Film Resist Laminator
- Unichem MP-4150 Green Tape Punch
- Fisher Sicentific 750 Isotemp Programmable Muffle Furface
- MTI GSK1600X Furnace
- Thermo Scientific Lindberg/Blue M Mini-Mite Tube Furnace